Ferroelectric PbTiO3 films grown by pulsed liquid injection MOCVD
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چکیده
منابع مشابه
Ferroelectric PbTiO3 films grown by pulsed liquid injection metalorganic chemical vapour deposition
The influence of various deposition conditions (deposition temperature, partial oxygen pressure and solution composition) to the growth of ferroelectric PbTiO3 (PTO) films by pulsed liquid injection metalorganic chemical vapour deposition (MOCVD) was examined. Films were grown on LaAlO3 (001), SrTiO3 (001) and sapphire (R-plane) substrates. Pb(thd)2 and Ti(O i Pr)2(thd)2 (thd = 2,2,6,6-tetramet...
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ژورنال
عنوان ژورنال: Surface and Coatings Technology
سال: 2007
ISSN: 0257-8972
DOI: 10.1016/j.surfcoat.2007.05.006